13

Fabrication of Bulk-Si FinFET using CMOS compatible process

Year:
2012
Language:
english
File:
PDF, 629 KB
english, 2012
41

Source/drain technologies for the scaling of nanoscale CMOS device

Year:
2011
Language:
english
File:
PDF, 1.91 MB
english, 2011
44

Damascene W/TiN gate MOSFETs with improved performance for 0.1-μm regime

Year:
2002
Language:
english
File:
PDF, 778 KB
english, 2002